Development of Microactuator Technologies for Space Applications

 

 

Eui-Hyeok.Yang

Jet Propulsion Laboratory/California Institute of Technology

 

 


We are developing MEMS-based wavefront correctors using microactuator technologies for adaptive optics applications in future space missions.  Active wavefront control is required subsequent to reflection from the primary mirror, particularly to overcome the potentially large spatial frequency errors anticipated with Gossamer type structures. Development of new, low-mass technologies is essential for wavefront correction for next generation optical instruments in Space.

Extremely small inchworm actuators may be required to provide the fine shape correction of primary apertures for future space telescopes.  Since conventional inchworm actuator technologies are bulky, there is considerable incentive to develop miniaturized inchworm motors (or actuators).  We are developing a linear microactuator technology with large linear motion.

 
We have demonstrated a large aperture continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array.  The DM consists of a continuous, large aperture, silicon membrane “transferred” in its entirety onto a 20 ´ 20 piezoelectric unimorph actuator array.  A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 mm at 20 V.  An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.


We have demonstrated a controlled deformation of silicon membrane mirrors using electroactive polymer, providing surface figure correction capability after deployment of primary mirrors.  We have designed, modeled and fabricated the G-elastomer-based mirror membranes. We have optically characterized several G-elastomer-based mirror membranes.  This concept can be scaled to deployable ultra-large mirror with self-reconfiguration capability.