Nano Fountain Pen using Passive Membrane Pumping for Nano Patterning

Youngkwan Lee¹, Sukhan Lee², Sungkeun Lee², Hunmo Kim^1*

This research is about that Nano Fountain pen (NFP)lithography uses existent Atomic Force Microscope (AFM) Probe, it is thing which do to pattern using pumping of membrane continuous injection and control of the amount of injection fluid are possible on the basis of research to Dippen Nano-lithography that do to pattern of Nano scale using chemical- physical phenomenon on the reaction target surface.

This in high-capacity reservoir that is formed to AFM's clamp with it link that bald to membrane that is linked with preceding descriptions tip by pressure that supply reactant through channel to assistance reservoir of tip and is imposed in tip transformation occur and the participle amount of fluid according to assistance reservoir's internal pressure change that is formed on the internal structure that control capacitates have. It is available by single device in circuit pattern that application of this device has size that is various and application is possible in broadband process by continuous jet.

¹   Control Laboratory, Department of Mechanical Engineering, Sungkyunkwan Univ.,

Chunchun-Dong, Jangan-Gu, Suwon, Kyunggi-Do, Korea

^* Corresponding Author

E-mail : kimhm@me.skku.ac.kr

Phone : 82-31-290-7500

²          Nano and Intelligent System Laboratory, School of Information and Communication Engineering, Sungkyunkwan Univ., Chunchun-Dong, Jangan-Gu, Suwon, Kyunggi-Do, Korea