Vacuum Technology - Providing Controlled Environment for NT/BT.

K H Chung

The Center for Vacuum Technology, Korea Research Institute of Standards and Science, Doryong-Dong, Yuseong-Gu, Daejeon, 305-340, Rep. of Korea

Vacuum technology provides controlled environment for scientific experiments and production lines. It is the bases for almost all areas of science and technology, materials, semiconductor and display production, surface analysis, space study, and in most R&D equipments. In old days, vacuum technology involved only vacuum pumps and well sealed chambers. But as science and technology developed, the importance of good vacuum technology is increasing ever more. In the processes where each unwanted molecules can ruin the whole process, like NT/BT, the precise control of the environment, processing gases, materials and surface treatments producing little particles and gases from all the moving parts are crucial.

The Center for Vacuum Technology of KRISS establishes and maintains national standards of vacuum, internationally recognized, from atmospheric pressure to very high vacuum, disseminates national standards to industry, and performs related researches. The Center has developed about 100 testing and performance characterization items for vacuum components, materials and systems and provided total solutions to all vacuum parts and systems. The Center performed more than 1500 tests from 1999 to 2003 for small and large industries as well as research institutes and schools. In this paper, most common vacuum related test items and test facilities were introduced.